Modeling, parameter estimation, and open-loop control of MEMS deformable mirrors

Vogel, Curtis R, Glenn A Tyler, and Yang Lu. 2010. “Modeling, Parameter Estimation, and Open-Loop Control of MEMS Deformable Mirrors”. In MOEMS-MEMS, 75950E-75950E. International Society for Optics and Photonics.
Last updated on 03/09/2023