Goldberg, Bennett, Thomas Bifano, Selim Unlu, Euan Ramsay, Hakan Koklu, Jerome Mertz, Yang Lu, Abdulkadir Yurt, and Christopher Stockbridge. 2014. “Solid Immersion Microscopy System With Deformable Mirror for Correction of Aberrations.”
PUBLICATIONS
2014
Vigil, Kyle, Yang Lu, Abdulkadir Yurt, Tenzile Berkin Cilingiroglu, Thomas G Bifano, Selim Unlu, and Bennett B Goldberg. 2014. “Backside FA With SILs: Integrated Circuit Super-Resolution Failure Analysis With Solid Immersion Lenses.”
2013
Lu, Yang. 2013. “Adaptive Optics Compensation On Sample Thickness Error Induced Aberration in Asil Confocal Scanning Microscopy”. In 39th International Symposium for Testing and Failure Analysis (November 3-7, 2013). Asm.
Lu, Yang, Thomas Bifano, Selim Unlu, and Bennett Goldberg. 2013. “Aberration Compensation in Aplanatic Solid Immersion Lens Microscopy”. Optics Express 21: 28189-97.
2012
Lu, Yang, Christopher R Stockbridge, Samuel M Hoffman, and Thomas G Bifano. 2012. “Variable Zoom System With Aberration Correction Capability”. Journal of Modern Optics 59: 1049-55.
Lu, Y., E Ramsay, C R Stockbridge, A Yurt, F.H. Koklu, T G Bifano, M.S. Unlu, and B B Goldberg. 2012. “Spherical Aberration Correction in Aplanatic Solid Immersion Lens Imaging Using a MEMS Deformable Mirror”. Microelectronics Reliability 52: 2120-22.
Bifano, Thomas G, Yang Lu, Christopher Stockbridge, Aaron Berliner, John Moore, Richard Paxman, Santosh Tripathi, and Kimani Toussaint. 2012. “MEMS Spatial Light Modulators for Controlled Optical Transmission through Nearly Opaque Materials”. In SPIE MOEMS-MEMS, 82530L-82530L. International Society for Optics and Photonics.
Stockbridge, C, Y. Lu, J. Moore, S Hoffman, R Paxman, K Toussaint, and T Bifano. 2012. “Focusing through Dynamic Scattering Media”. Optics Express 20: 15086-92.
Sun, Wei, Yang Lu, Jason B Stewart, Thomas G Bifano, and Charles P Lin. 2012. “Critical Considerations of Pupil Alignment to Achieve Open-Loop Control of MEMS Deformable Mirror in Nonlinear Laser Scanning Fluorescence Microscopy”. In SPIE MOEMS-MEMS, 82530H-82530H. International Society for Optics and Photonics.